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Kurzbeschreibung This book's focus and intent is to impart an understanding of the practical application of atmospheric plasma for the advancement of a wide range of current and emerging technologies. The primary key feature of this book is the introduction of over thirteen years of practical experimental evidence of successful surface modifications by atmospheric plasma methods.
Aus dem Inhalt Preface xi
1. Plasma - The Fourth State of Matter 1
1.1 Fundamentals of Plasmas 1
1.2 Thermal vs. Nonthermal Plasmas 6
1.3 Mechanisms for Surfaces Reactions 22
2. Plasmas for Surface Modification 27
2.1 Low-Pressure Plasmas 28
2.2 Microwave Systems 31
2.3 Physical Vapor Deposition Systems 33
2.4 Atmospheric Plasma Systems 42
2.5 Atmospheric Plasma Precursor Deposition Systems 51
