Wiley-VCH - Hsu, Tai-Ran - MEMS & Microsystems

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	Area of interest \| Electrical & Electronics Engineering \| \| Available titles \| MEMS & Microsystems

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Ernst & Sohn

Hsu, Tai-Ran MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering 2. Edition April 2008 129.- Euro 2008. 576 Pages, Hardcover - Handbook/Reference Book - ISBN 978-0-470-08301-7 - John Wiley & Sons	Sample Chapter
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Short description MEMS & Microsystems provides an engineering design approach to MEMS and microsystems, appropriate for professionals and senior level students. Numerous examples, cases, and applied problems are provided. From the contents Preface. Chapter 1: Overview of MEMS and Microsystems. Problems. Chapter 2: Working Principles of Microsystems. Problems. Chapter 3: Engineering Science for Microsystems Design and Fabrication. Problems. Chapter 4: Engineering Mechanics for Microsystems Design. Problems. Chapter 5: Thermofluid Engineering and Microsystems Design. Problems. Chapter 6: Scaling Laws in Miniaturization. Problems. Chapter 7: Materials for MEMS and Microsystems. Problems. Chapter 8: Microsystems Fabrication Processes. Problems. Chapter 9: Overview of Micromanufacturing. Problems. Chapter 10: Microsystem Design. Problems. Chapter 11: Assembly, Packaging and Testing of Microsystems. Problems. Chapter 12: Introduction to Nanoscale Engineering. Problems. Bibliography. Index.

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