Short description Microelectronic Applications Using Chemical Mechanical Planarization provides a systematic and comprehensive description of current CMP technology used in high-tech products such as video games, portable communications devices, and high-speed computers. It covers includes new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and technologies like MEMS (Micro-Electro-Mechanical Systems). It also covers fundamentals and basic science, making it an ideal introduction for CMP newcomers and a valuable reference for professionals.
