|  | Baltes, Henry / Brand, Oliver / Fedder, Gary K. / Hierold, Christofer / Korvink, Jan G. / Tabata, Osamu (eds.)
CMOS-MEMS
Advanced Micro and Nanosystems (Volume 2)
 1. Edition - January 2005
259.- Euro*
2005. XII, 596 Pages, Hardcover
312 Fig., 32 Tab.
- Handbook/Reference Book -
ISBN-10: 3-527-31080-0
ISBN-13: 978-3-527-31080-7 - Wiley-VCH, Weinheim
* Series price on request at service@wiley-vch.de
Sample Chapter
Short description
Microstructures, electronics, nanotechnology - vast fields of research are growing together as the size gap narrows. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.
This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
From the contents
Introduction
Fabrication Technology
Material Characterization
CMOS-based Inertial Sensors
CMOS-based Pressure Sensors
CMOS-based Acoustic Sensors
CMOS-based RF-MEMS
CMOS-based Chemical Sensors
CMOS-based Biometric Sensors
CMOS-bassd Biological Sensors
CMOS-based Thermal Sensors
Circuit and System Integration
Assembly and Packaging
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