1. Edition - January 2009 93.90 Euro 2009. 700 Pages, Hardcover - Professional Book - ISBN-10: 0-470-47155-7 ISBN-13: 978-0-470-47155-5 - John Wiley & Sons
Short description EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
