Schroder, Dieter K. Semiconductor Material and Device Characterization
3. Edition - February 2006 142.- Euro 2006. 800 Pages, Hardcover - Practical Approach Book - ISBN-10: 0-471-73906-5 ISBN-13: 978-0-471-73906-7 - John Wiley & Sons
Short description Semiconductor Material and Device Characterization is the only book on the market devoted to the characterization techniques used by the modern semiconductor industry to measure diverse semiconductor materials and devices. It covers the full range of electrical and optical characterization methods while thoroughly treating the more specialized chemical and physical techniques. In the third edition, Professor Schroder has rewritten parts of each chapter and added two new chapters (Charge Based Measurements and Failure Analysis and Reliability), redrawn and updated most figures, and included new problems and approximately 100 new references.
From the contents Preface to Third Edition.
1. Resistivity.
2. Carrier and Doping Density.
3. Contact Resistance and Schottky Barriers.
4. Series Resistance, Channel Length and Width, and Threshold Voltage.
5. Defects.
6. Oxide and Interface Trapped Charges, Oxide Thickness.
