Wiley-VCH - Mahan, John E. - Physical Vapor Deposition of Thin Films

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Mahan, John E. Physical Vapor Deposition of Thin Films 1. Edition February 2000 145.- Euro 2000. 336 Pages, Hardcover ISBN 978-0-471-33001-1 - John Wiley & Sons
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Short description The deposition of thin films is crucial in a variety of high-tech industries, including semiconductor devices, micromechanical devices, optical coatings, compact discs, and flat panel data displays. This book is devoted to one of the main techniques for preparing these thin films, physical vapor deposition. From the contents Introduction to Physical Vapor Deposition. The Kinetic Theory of Gases. Adsorption and Condensation. Principles of High Vacuum. Evaporation Sources. Principles of Sputtering Discharges. Sputtering. Film Deposition. Index.

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