Hsu, Tai-Ran MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering
2. Edition - April 2008 122.- Euro 2008. 576 Pages, Hardcover - Handbook/Reference Book - ISBN-10: 0-470-08301-8 ISBN-13: 978-0-470-08301-7 - John Wiley & Sons
Short description MEMS & Microsystems provides an engineering design approach to MEMS and microsystems, appropriate for professionals and senior level students. Numerous examples, cases, and applied problems are provided.
From the contents Preface.
Chapter 1: Overview of MEMS and Microsystems.
Problems.
Chapter 2: Working Principles of Microsystems.
Problems.
Chapter 3: Engineering Science for Microsystems Design and Fabrication.
Problems.
Chapter 4: Engineering Mechanics for Microsystems Design.
Problems.
Chapter 5: Thermofluid Engineering and Microsystems Design.
Problems.
Chapter 6: Scaling Laws in Miniaturization.
Problems.
Chapter 7: Materials for MEMS and Microsystems.
Problems.
Chapter 8: Microsystems Fabrication Processes.
Problems.
Chapter 9: Overview of Micromanufacturing.
Problems.
Chapter 10: Microsystem Design.
Problems.
Chapter 11: Assembly, Packaging and Testing of Microsystems.
Problems.
Chapter 12: Introduction to Nanoscale Engineering.
