3. Edition - July 2003
122.- Euro
2003. 536 Pages, Hardcover
- Practical Approach Book -
ISBN-10: 0-471-27052-0
ISBN-13: 978-0-471-27052-2 - John Wiley & Sons








Short description
The use of vacuum technology is essential in the production of microelectronics, optics, specialty pharmaceuticals, chemical analysis and other areas where high degrees of purity and cleanliness are required. This new edition of a Wiley bestseller focuses on the understanding, operation and selection of equipment for processes used in semiconductor, optics and related technologies. The book emphasizes subjects not adequately covered elsewhere, while avoiding in-depth treatments of topics interesting only to the designer or curator.

From the contents
Vacuum Technology.

Gas Properties.

Gas Flow.

Gas Release from Solids.

Pressure Gauges.

Flow Meters.

Pumping Speed.

Residual Gas Analyzers.

Interpretation of RGA Data.

Mechanical Pumps.

Turbomolecular Pumps.

Diffusion Pumps.

Pump Fluids.

Getter and Ion Pumps.

Cryogenic Pumps.

Materials in Vacuum.

Joints, Seals, and Valves.

Lubrication.

Rough Vacuum Pumping.

High Vacuum Systems.

Ultraclean Vacuum Systems.

High Flow Systems.

Multichamber Systems.

Leak Detection.

Symbols.

Appendix A. Units and Constants.

Appendix B. Gas Properties.

Appendix C. Material Properties.

Appendix D. Isotopic Abundances.

Appendix E. Cracking Patterns.

Appendix F. Pump Fluid Properties.

Index.