Reliability of MEMS
Testing of Materials and Devices
Advanced Micro and Nanosystems (Band Nr. 6)
1. Auflage Dezember 2007
XX, 304 Seiten, Hardcover
The first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of MEMS microelectromechanical materials, components and devices. As such, it covers both component materials as well as entire MEMS devices.
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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating-Substrate Systems
Thin-film Characterization Using the Bulge Test
Uniaxial Tensile Test for MEMS Materials
On-chip Testing of MEMS
Reliability of a Capacitive Pressure Sensore
High-accuracy, High-reliability MEMS Accelerometer
Reliability of MEMS Variable Optical Attenuator
Eco Scan MEMS Resonant Mirror
Toshiyuki Tsuchiya received his Ph.D. degree from Nagoya University, Japan, in 2002. From 1993 to 2004, he carried out industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. In 2004, he joined the Department of Mechanical Engineering of Kyoto University and is currently Associate Professor in the Department of Microengineering. Toshiyuki Tsuchiya's current research is focused on mechanical properties evaluation of micro/nano materials and MEMS and micro/nano system synthetic engineering (SENS). He received the R&D 100 Award in 1998.