Steigerwald, Joseph M. / Murarka, Shyam P. / Gutmann, Ronald J. Chemical Mechanical Planarization of Microelectronic Materials
1. Edition February 1997 142.- Euro 1997. XIII, 324 Pages, Hardcover 181 Fig. - Monograph - ISBN 978-0-471-13827-3 - Wiley-VCH, Berlin
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Short description This book covers the chemical and mechanical polishing techniques of electronic materials used in the microelectronics industry to improve the electronic properties of materials such as oxide.
From the contents Chemical Mechanical Planarization-An Introduction.