|  | Saile, Volker / Wallrabe, Ulrike / Tabata, Osamu (eds.)
LIGA and its Applications
Advanced Micro and Nanosystems (Volume 7)
Edited by Korvink, Jan G. / Brand, Oliver / Fedder, Gary K. / Hierold, Christofer
 1. Edition - November 2008
205.- Euro*
2008. X, 480 Pages, Hardcover
387 Fig. (8 Colored Fig.), 31 Tab.
- Handbook/Reference Book -
ISBN-10: 3-527-31698-1
ISBN-13: 978-3-527-31698-4 - Wiley-VCH, Weinheim
* Series price on request at service@wiley-vch.de
Content
Sample Chapter
Index
Short description
Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook illustrates optimization strategies, techniques and assembly pathways to achieve the combination of complex, even 3D structures with simple manufacturing steps.
From the contents
Introduction
I. Technologies
Innovative exposure techniques for 3-D microfabrication
Large Surface Area Techniques
PTFE photo-fabrication by SR (TIEGA process)
Photomask Technologies
Photomask Comparisons
Galvanics and Molding
Simulating New LIGA Processes
Commercial Simulation Program
Simulation Tools for Design
Design for Assembly and Safe Manufacturing
II. Applications
Market Analysis and Commercialization of LIGA
Optical MEMS and Polymer Optics
Micromechanics
RF Applications
Evolution of the Spectrometer
Microfluidics in Biotechnology
MEMS (actuators)
Microfluidics for Biochip Applications
Ultrasonic Transducers
Swiss Luxury Watches Using MEMS Components
III. Outlook
Extreme Nanostructuring
Novel Resist Systems
Hard Gold
Interferential X-ray Lithography
Table-top Synchrotrons for Future Light Sources and their Application in Microfabrication
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