|  | Saile, Volker / Wallrabe, Ulrike / Tabata, Osamu (Hrsg.)
LIGA and its Applications
Advanced Micro and Nanosystems (Band 7)
Herausgegeben von Korvink, Jan G. / Brand, Oliver / Fedder, Gary K. / Hierold, Christofer
 1. Auflage - November 2008
205,- Euro*
2008. X, 480 Seiten, Hardcover
387 Abb. (8 Farbabb.), 31 Tab.
- Handbuch/Nachschlagewerk -
ISBN-10: 3-527-31698-1
ISBN-13: 978-3-527-31698-4 - Wiley-VCH, Weinheim
Preis inkl. Mehrwertsteuer zzgl. Versandkosten.
* Serienpreis auf Anfrage bei service@wiley-vch.de
Inhalt
Probekapitel
Index
Kurzbeschreibung
Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook illustrates optimization strategies, techniques and assembly pathways to achieve the combination of complex, even 3D structures with simple manufacturing steps.
Aus dem Inhalt
Introduction
I. TECHNOLOGIES
Standard Lithography and Mask Technology
Innovative Exposure Techniques for 3-D Microfabrication
Galvanics (Electroplating)
Moulding (Process and Simulation)
Tools for Design
Design for Assembly and Safe Manufacturing
II. APPLICATIONS
Market Analysis and Commercialization of LIGA
Optical MEMS and Polymer Optics
X-ray Lenses
RF Applications
Evolution of the Spectrometer
MEMS (Actuators)
Microfluidics for Biochip Application
Applications for Inspection Devices
Harmonic Drive Gears
III. COMMERCIAL EQUIPMENT
Machines for Micro Injection Moulding
IV. OUTLOOK
Filled Resist Systems
Tabletop Synchrotron for Future Light Source and its Application for Microfabrication
PTFE Photofabrication by SR (TIEGA Process)
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