|  | | 04.09.2002 Periodic patterns with submicrometer features...
in a photoresist supported on glass have been generated using arrays of microlenses and macroscopic transparency-film photomasks. Deposition of a chromium film, followed by lift-off, converts the photoresist pattern into a chrome mask for pattern transfer to other substrates by contact photolithography. (G. M. Whitesides et al., September 3, Adv. Mater. 2002, 14, 1213-1216) |
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