Scaling Issues and Design of MEMS
1. Auflage Januar 2008
244 Seiten, Hardcover
Praktikerbuch
Kurzbeschreibung
Scaling Issues and Design of MEMS uses a microrobot as a vehicle for a microsystem scaling study to introduce the theoretical and conceptual aspect of this research, as well as the real-world problems that have been encountered. The authors provide a thought provoking yet informative discussion of the scaling of Electronic and Electromechanical Devices, including Micro Electro Mechanical Systems (MEMS) to Nano Electro Mechanical Systems (NEMS), energy sources and power supply strategies and monitoring. There are also several chapters on specific devices and applications, such as temperature microsensors and micro-opto-electro-mechanical systems, which can be considered either as stand alone case studies or past of more complex systems, like a microrobot. For each device discussed, the analysis of dimensional scaling, the modeling, design, and the experimental characterization are reported. The book concludes with a look at semiconductor-based Nano Electro Mechanical Systems.
This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including:
* temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) thermocouple;
* mechanical sensors;
* inductive microsensors for the detection of magnetic particles;
* electrostatic, thermal and magnetic actuators.
With an original approach, this informative text encompasses the entire range of themes currently at the forefront of MEMS, including an analysis of the importantissue of energy sources in MEMS. In addition, the book explores contemporary research into the design of complete MEMS with a case study on colonies of microbots.
Scaling Issues and Design of MEMS aims to improve the reader's basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science.
Introduction.
1. Scaling of MEMS.
2. Scaling of Microactuators - an Overview.
3. Scaling of Thermal Sensors.
4. Inductive Sensors for Magnetic Fields.
5. Scaling of Mechanical Sensors.
6. Scaling of Energy Sources.
7. Technologies and Architectures for Autonomous MEMS Microrobots.
8. Moving towards the Nanoscale.
9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB.
10. Concluding Remarks.
Index.
