Microsystem Technology

1. Edition December 2000
XII, 500 Pages, Hardcover
400 Pictures
20 tables
Handbook/Reference Book
Short Description
The second edition of a bestselling concise introduction to the fast growing area of microsystems technology. Completely revised it covers the fundamentals and the latest trends of this interdisciplinary area (e.g., LIGA, silicium technology, and applications in medicine and health technology).
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology