Metal Based Thin Films for Electronics

1. Introduction

2. Thin Film Systems: Basic Aspects
- Interconnects for Microelectronics
- Metallization Structures in Acoustoelectronics
- Silicide Layers for Electronics
- Complex Layered Systems for Magnetoelectronics
- Multilayer and Single-Surface Reflectors for X-Ray Optics

3. Thin Film Preparation and Characterization Techniques
- Thin Film Preparation Methods
- Electron Microscopy and Diffraction
- X-Ray Scattering Techniques
- Spectroscopic Techniques
- Stress Measurement Techniques

4. Challenges for Thin Film Systems Characterization and Optimization
- Electromigration in Metallization Layers
- Barrier and Nucleation Layers for Interconnects
- Acoustomigration in Surface Acoustic Waves Structures
- Thermal Stability of Magnetoresistive Layer Stacks
- Functional Magnetic Layers for Sensors and MRAMs
- Multilayers for X-Ray Optical Purposes
- Functional Electric Layers

5. Devices
- Devices Related Aspects for Si Based Electronics
- SAW High Frequency Filters, Resonators and Delay Lines
- Sensor Devices
- X-Ray Optical Systems
- Thermoelectric Sensors and Transducers

6. Outlook

"...I can certainly agree with the final sentence of the book cover: A perfect introduction to the field-for professionals and students."
Angewandte Chemie 2004 No. 11, Uwe Bornscheuer

"Through its focus on practical aspects and its didactic approach, the book is designed especially for practitioners. It can be highly recommended to materials engineers, physicists or process engineers who work or plan to work in the still exciting field of micro electronics."
Winfried Blau, European Society of Thin Films, Dresden

Klaus Wetzig studied physics at the University of Technology in Dresden, receiving his licence in 1963, his doctorate in 1967 and his habilitation in 1973. In 1975 he moved to the Academy of Sciences, and since 1992 he is Full Professor of Materials Analysis at the University of Technology in Dresden and Director at the Leibniz Institute of Solid State and Materials Research Dresden.
His research interests include materials analysis and microstructures, especially electron microscopy of functional materials, characterization of thin films for electronics, and nanostructural features in general.


Claus Michael Schneider studied physics at the Institute of Technology Aachen receiving his diploma in 1985. He obtained his PhD in 1990 at the Free University of Berlin and his habilitation in 1996 at the Martin-Luther-University Halle. In 1998 he moved to the Leibniz Institute of Solid State and Materials Research Dresden, heading the department of thin film systems and nanostructures. In June 2003 he was appointed director at the Institut für Festkörperforschung (IFF-IEE) of the Forschungszentrum Jülich.
His research interests include solid state physics, thin film systems and surface magnetism as well as the physics of nanostructures.

K. Wetzig, IFW Dresden, Germany; C. M. Schneider, Forschungszentrum Jülich, Germany