Cold Plasma Materials Fabrication
From Fundamentals to Applications

1. Edition March 1994
272 Pages, Softcover
Wiley & Sons Ltd
Cold plasma research and development activities, as well as its
applications in materials processing have grown enormously in the
past decade. Cold Plasma in Materials Fabrication is a
comprehensive, up-to-date monograph which presents all aspects of
cold, low-pressure plasmas.
The eight extensive chapters in this book cover the following
topics:
* The main parameters and classifications of different types of
plasma
* Reactions within cold plasmas and between cold plasmas and
solid surfaces
* State-of-the-art methods for generation and diagnostics of cold
plasmas and their application for processing of materials
This invaluable reference tool provides a helpful bibliography with
suggestions for further reading on each subject. The book will be
of importance to manufacturing engineers and scientists, as well as
advanced students in engineering, materials, physics, and chemistry
programs.
List of Symbols.
Fundamentals of Plasma.
Cold Plasma Generation.
Plasma Chemistry.
Plasma Reactors.
Plasma Diagnostics.
Cold Plasma Processes for Surface Modification.
Deposition of Coatings by PECVD.
Plasma Assisted Etching.
Index.
About the Author.