Etching in Microsystem Technology
1. Edition April 1999
XVI, 368 Pages, Hardcover
71 Pictures
10 tables
Handbook/Reference Book
Short Description
Explaining the scientific fundamentals of etching processes which occupy a key position in microfabrication this work is a practical guide for etching processes. The practical section is set out like a cookery book: it gives recipes for many etching processes and helps to produce perfect microstructures.
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- Out of print -
Further versions
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices.
The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering.
The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.
Features of Microtechnical Etching
Wet Chemical Etching Methods
Dry-etching Methods
Microforming by Etching of Locally Changed Material
Selected Recipes
